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Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.
Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.
Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.
《Materials Science In Semiconductor Processing》是一本由ELSEVIER SCI LTD出版商出版的專業工程技術期刊，該刊創刊于1998年，刊期Bimonthly，該刊已被國際權威數據庫SCI、SCIE收錄。在中科院最新升級版分區表中，該刊分區信息為大類學科：工程技術 3區，小類學科：工程：電子與電氣 3區；材料科學：綜合 3區；物理：應用 3區；物理：凝聚態物理 3區；在JCR（Journal Citation Reports）分區等級為Q2。該刊發文范圍涵蓋工程：電子與電氣等領域，旨在及時、準確、全面地報道國內外工程：電子與電氣工作者在該領域取得的最新研究成果、工作進展及學術動態、技術革新等，促進學術交流，鼓勵學術創新。2021年影響因子為4.644，平均審稿速度約1.7個月。
| 大類學科 | 分區 | 小類學科 | 分區 | Top期刊 | 綜述期刊 |
| 工程技術 | 3區 | ENGINEERING, ELECTRICAL & ELECTRONIC 工程：電子與電氣 MATERIALS SCIENCE, MULTIDISCIPLINARY 材料科學：綜合 PHYSICS, APPLIED 物理：應用 PHYSICS, CONDENSED MATTER 物理：凝聚態物理 | 3區 3區 3區 3區 | 否 | 否 |
| JCR分區等級 | JCR所屬學科 | 分區 | 影響因子 |
| Q2 | MATERIALS SCIENCE, MULTIDISCIPLINARY | Q2 | 4.644 |
| PHYSICS, APPLIED | Q2 | ||
| PHYSICS, CONDENSED MATTER | Q2 | ||
| ENGINEERING, ELECTRICAL & ELECTRONIC | Q2 |
| 影響因子 | h-index | Gold OA文章占比 | 研究類文章占比 | OA開放訪問 | 平均審稿速度 |
| 4.644 | 49 | 1.53% | 98.85% | 未開放 | 約1.7個月 |
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